Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1989-12-21
1991-11-12
Bowers, Jr., Charles L.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
437227, 156628, G03C 500
Patent
active
050647482
ABSTRACT:
A method for anisotropically hardening a protective coating to provides a well defined edge thereon for forming features which may be smaller than the resolution limit of the exposure equipment, for the purpose of integrated circuit manufacture. The method includes the steps of forming a non-planar coating on a substrate with a photoresist material having a sensitivity ot incident flux that varies as a function of the angle of the incidence of the flux upon the coating. The coating is anisotropically hardened by exposing it to flux to which it has a relatively high sensitivity so that portions for which the flux is incident at one angle are more hardened than those portions where the flux is incident at a different angle. Narrow trenches or studs may thereby be formed.
REFERENCES:
patent: 3997342 (1976-12-01), Sakurai et al.
patent: 4068018 (1978-01-01), Hashimoto et al.
patent: 4115120 (1978-09-01), Dyer et al.
patent: 4231811 (1980-11-01), Somekh et al.
patent: 4268615 (1981-05-01), Yonezawa
patent: 4499177 (1985-02-01), Vollenbroek et al.
patent: 4529860 (1985-07-01), Robb
patent: 4543320 (1985-09-01), Vijan
patent: 4826754 (1989-02-01), Bobbio
"VLSI Technology"--by S. M. Sze--Copyrighted 1983, McGraw Hill Book Co., N.Y., pp. 267-273.
Chapter 12 of "Silicon Processing for the VLSI Era"--By Wolf & Tauber.
Bowers Jr. Charles L.
MCNC
Neville Thomas R.
LandOfFree
Method for anisotropically hardening a protective coating for in does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for anisotropically hardening a protective coating for in, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for anisotropically hardening a protective coating for in will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1012698