Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1987-04-27
1989-05-02
Dees, Jose G.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
430313, 430317, 437227, 156628, 156643, G03C 500
Patent
active
048267546
ABSTRACT:
A method for anisotropically hardening a protective coating to provide a well defined edge thereon for forming features which may be smaller than the resolution limit of the exposure equipment for the purpose of integrated circuit manufacture is disclosed. The method includes the steps of forming a non-planar coating on a substrate with a photoresist material having a sensitivity to incident flux that varies as a function of the angle of the incidence of the flux upon the coating. The coating is anisotropically hardened by exposing it to flux to which it has a relatively high sensitivity so that portions for which the flux is incident at one angle are more hardened than those portions where the flux is incident at a different angle.
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VLSI Technology-by S. M. Sze-copyright 1983, McGraw-Hill Book Co., New York, pp. 267-273.
Dees Jos,e G.
Microelectronics Center of North Carolina
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