Measuring and testing – Instrument proving or calibrating – Gas or liquid analyzer
Reexamination Certificate
2007-05-08
2007-05-08
Raevis, Robert (Department: 2856)
Measuring and testing
Instrument proving or calibrating
Gas or liquid analyzer
Reexamination Certificate
active
11362822
ABSTRACT:
An inspection device inspects a humidity sensor having a sensor portion and a circuit portion, which are integrated into one chip. The inspection device includes: an inspection chamber for accommodating a wafer, in which a plurality of humidity sensors are disposed as a sensor chip in a wafer state; a probe for contacting an electrode pad of the circuit portion; a tester electrically connected to the probe for inspecting electric properties of the humidity sensor; and a temperature-humidity control portion for controlling a temperature and a humidity in the inspection chamber.
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Isogai Toshiki
Itakura Toshikazu
Denso Corporation
Nippon Soken Inc.
Posz Law Group , PLC
Raevis Robert
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