Photocopying – Projection printing and copying cameras – Detailed holder for original
Reexamination Certificate
2008-02-12
2010-11-02
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
Detailed holder for original
C430S005000
Reexamination Certificate
active
07826038
ABSTRACT:
A method for adjusting the flatness of a lithographic mask includes determining an initial mask flatness of the mask, determining an applied stress for bringing the mask to a desired mask flatness, and determining a mounting temperature of a pellicle frame to be mounted to the mask, the mounting temperature corresponding to the applied stress. The actual temperature of the pellicle frame is adjusted to the determined mounting temperature, and the pellicle frame is mounted to the mask at the mounting temperature.
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E.P. Cotte et al.; “Experimental and Numerical Studies of the Effects of Materials and Attachment Conditions on Pellicle-Induced Distortions in Advanced Photomasks;” Photomask and Next-Generation Lithography Mask Technology IX, Proceedings of SPIE vol. 4754 (2002); pp. 579-588.
Gallagher Emily F.
Kindt Louis M.
Slinkman James A.
Wistron Richard E.
Cantor & Colburn LLP
International Business Machines - Corporation
Kim Peter B
Kotulak Richard
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