Photocopying – Projection printing and copying cameras – Detailed holder for original
Reexamination Certificate
2008-04-08
2008-04-08
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for original
C430S005000
Reexamination Certificate
active
10905453
ABSTRACT:
A method for adjusting the flatness of a lithographic mask includes determining an initial mask flatness of the mask, determining an applied stress for bringing the mask to a desired mask flatness, and determining a mounting temperature of a pellicle frame to be mounted to the mask, the mounting temperature corresponding to the applied stress. The actual temperature of the pellicle frame is adjusted to the determined mounting temperature.
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E.P cOTTE, R. L. Engelstad, E. G. Lovell, D. Tanzil, F. O. Eschbach, and E. Y. Shu; “Experimental and Numerical Studies of the Effects of Materials and Attachment Conditions on Pellicle-Induced Distortions in Advanced Photomasks;” Proceedings of the SPIE vol. 4754; 2002; pp. 579-588, 2002.
Gallagher Emily F.
Kindt Louis M.
Slinkman James A.
Wistrom Richard E.
Cantor & Colburn LLP
Kim Peter B.
Kotulak Richard
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