Method for adjusting a projection objective

Details Method for adjusting a projection objective Method for adjusting a projection objective

2008-05-13

2008-05-13

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Focus or magnification control

C355S053000

Reexamination Certificate

active

07372545

ABSTRACT:
A projection objective having a number of adjustable optical elements is optimized with respect to a number of aberrations by specifying a set of parameters describing imaging properties of the objective, each parameter in the set having an absolute value at each of a plurality of field points in an image plane of the projection objective. At least one of the optical elements is adjusted such that for each of the parameters in the set, the field maximum of its absolute value is minimized.

REFERENCES:
patent: 5973863 (1999-10-01), Hatasawa et al.
patent: 6961115 (2005-11-01), Hamatani et al.
patent: 2002/0001088 (2002-01-01), Wegmann et al.
patent: 2004/0042094 (2004-03-01), Matsuyama
patent: 1 231 516 (2002-08-01), None

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