Method comprising substrates coated with an antihalation layer t

Details Method comprising substrates coated with an antihalation layer t Method comprising substrates coated with an antihalation layer t

1997-11-26

1998-12-22

Codd, Bernard

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Processing feature prior to imaging

430325, 430326, 430330, 522113, 522126, 522130, 522132, 522133, G03C 516, C08J 328

Patent

active

058517383

ABSTRACT:
Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.

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