Method and system of providing a dynamic sampling plan for...

Details Method and system of providing a dynamic sampling plan for... Method and system of providing a dynamic sampling plan for...

2008-07-08

2008-07-08

Raymond, Edward (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Quality evaluation

C382S149000

Reexamination Certificate

active

07398172

ABSTRACT:
A method and system of providing a dynamic sampling plan for integrated metrology is disclosed. The method may include modeling a sampling plan for use with a factory level advanced processing control (FL-APC) system and sending a recommended sampling plan, in response to receiving a request for a sampling plan, wherein the recommended sampling plan is based upon the modeling and the request. The recommended sampling plan may be sent to an equipment interface (EI) and on to a tool for implementation in a manufacturing environment.

REFERENCES:
patent: 5784554 (1998-07-01), Hsiung
patent: 6442496 (2002-08-01), Pasadyn et al.
patent: 6687561 (2004-02-01), Pasadyn et al.
patent: 6821792 (2004-11-01), Sonderman et al.
patent: 6920405 (2005-07-01), Lawrence
patent: 2006/0184264 (2006-08-01), Willis et al.

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