Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of...
Reexamination Certificate
2011-07-12
2011-07-12
Coleman, W. David (Department: 2823)
Semiconductor device manufacturing: process
Radiation or energy treatment modifying properties of...
C432S122000
Reexamination Certificate
active
07977258
ABSTRACT:
Process and system for processing wafer-shaped objects, such as semiconductor wafers is disclosed. In accordance with the present disclosure, a multiple of two wafers are processed in a thermal processing chamber. The thermal processing chamber is in communication with at least one heating device for heating the wafers. The wafers are placed in the thermal processing chamber in a face-to-face configuration or in a back-to-back configuration.
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Cardema Rudy
Devine Daniel J.
Falter Manfred
Fidelman Igor
Hu Yao Zhi
Coleman W. David
Dority & Manning PA
Mattson Technology Inc.
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