Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Plural fluid growth steps with intervening diverse operation
Reexamination Certificate
2008-09-02
2008-09-02
Malsawma, Lex (Department: 2892)
Semiconductor device manufacturing: process
Formation of semiconductive active region on any substrate
Plural fluid growth steps with intervening diverse operation
C257SE21092
Reexamination Certificate
active
11352652
ABSTRACT:
The method and system for providing a magnetic element are disclosed. The method and system include providing a magnetic element stack that includes a plurality of layers and depositing a stop layer on the magnetic element stack. The method and system also include providing a dielectric antireflective coating (DARC) layer on the stop layer, forming a single layer mask for defining the magnetic element on a portion of the DARC layer, and removing a remaining portion of the DARC layer not covered by the single layer mask. The portion of the DARC layer covers a portion of the stop layer. The method further includes removing a remaining portion of the stop layer and defining the magnetic element using at least the portion of stop layer as a mask.
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Chen Benjamin
Chen Yingjian
Hiner Hugh C.
Nease Brant
Wang Lei
Malsawma Lex
Prejean, Esq. Jonathan E.
Strategic Patent Group
Ullah Elias
Western Digital (Fremont) , LLC
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