Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2007-03-07
2011-10-18
DeCady, Albert (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S095000, C700S100000, C716S051000, C716S052000, C716S053000, C716S054000, C716S055000, C705S007120, C705S007130, C705S007220, C705S007230
Reexamination Certificate
active
08041440
ABSTRACT:
Aspects of the present disclosure provide a method and a system for providing a selection of golden tools for better defect density and product yield. A golden tool selection and dispatching system is provided to integrate different components for robust golden tool selection and dispatching. The golden tool selection system selects a set of golden tools based on performance of a set of manufacturing tools and provides a fully automated operational environment to produce a product using the set of golden tools.
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Cheng Chang Yung
Fu Hsueh-Shih
Wang Chin-Kun
Wang Ying-Lang
Chang Sunray
DeCady Albert
Haynes and Boone LLP
Taiwan Semiconductor Manufacturing Company , Ltd.
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