Method and system for predicting process performance using...

Details Method and system for predicting process performance using... Method and system for predicting process performance using...

2008-10-22

2010-11-30

Sparks, Donald (Department: 2129)

Data processing: artificial intelligence

Knowledge processing system

C706S021000, C706S023000, C438S017000

Reexamination Certificate

active

07844559

ABSTRACT:
A method for constructing a process performance prediction model for a material processing system, the method including the steps of: recording tool data for a plurality of observations during a process in a process tool, the tool data comprises a plurality of tool data parameters; recording process performance data for the plurality of observations during the process in the process tool, the process performance data comprises one or more process performance parameters; performing a partial least squares analysis using the tool data and the process performance data; and computing correlation data from the partial least squares analysis.

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Nomikos et al., Multi-way partial least squares in monitoring batch processes, 1995.

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