Electric heating – Metal heating – By arc
Reexamination Certificate
2007-02-13
2007-02-13
Johnson, Jonathan (Department: 1725)
Electric heating
Metal heating
By arc
Reexamination Certificate
active
11114520
ABSTRACT:
A high-speed method and system for precisely positioning a waist of a material-processing laser beam to dynamically compensate for local variations in height of microstructures located on a plurality of objects spaced apart within a laser-processing site are provided. In the preferred embodiment, the microstructures are a plurality of conductive lines formed on a plurality of memory dice of a semiconductor wafer. The system includes a focusing lens subsystem for focusing a laser beam along an optical axis substantially orthogonal to a plane, an x-y stage for moving the wafer in the plane, and a first air bearing sled for moving the focusing lens subsystem along the optical axis.
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Cahill Steven P.
Ehrmann Jonathan S.
Hunter Bradley L.
Plotkin Michael
Brooks & Kushman P.C.
GSI Group Corporation
Johnson Jonathan
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