Method and system for patterning of magnetic thin films...

Details Method and system for patterning of magnetic thin films... Method and system for patterning of magnetic thin films...

2003-10-08

2009-11-03

Mai, Anh D (Department: 2814)

Semiconductor device manufacturing: process

Having magnetic or ferroelectric component

C257SE21663, C428S690000

Reexamination Certificate

active

07611911

ABSTRACT:
A method (and resulting structure) of patterning a magnetic thin film, includes using a chemical transformation of a portion of the magnetic thin film to transform the portion to be non-magnetic and electrically insulating.

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