Charged particle beam apparatus, method for controlling...

Details Charged particle beam apparatus, method for controlling... Charged particle beam apparatus, method for controlling...

2007-11-28

2009-12-01

Vo, Tuyet (Department: 2821)

Radiant energy

Ion generation

Field ionization type

C250S424000, C250S426000, C250S3960ML, C250S398000, C315S501000, C315S500000, C315S400000

Reexamination Certificate

active

07626180

ABSTRACT:
An ion gun11supplies an Ar gas into a main body111from a gas inlet114, causes DC hot cathode discharge between a filament113and an anode112to generate Ar plasma. Next, a voltage gradient is applied to separated accelerator grids116a,116bhaving a bi-separated configuration in an ion ejecting direction. The each potential of the separated accelerator grids116a,116bis independently controlled by independently setting accelerator control switches121a,121bon or off to change the potential of that of the separated accelerator grids116a,116bwhich corresponds to an ion beam to be disabled.

REFERENCES:
patent: 6724160 (2004-04-01), Kaufman et al.
patent: 2000323442 (2000-11-01), None
patent: 2003298374 (2003-10-01), None

Affiliated with

Also associated with

Rating

Charged particle beam apparatus, method for controlling... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Charged particle beam apparatus, method for controlling..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charged particle beam apparatus, method for controlling... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4138774