Method and system for optical inspection of an object

Details Method and system for optical inspection of an object Method and system for optical inspection of an object

2006-02-28

2006-02-28

Stafira, Michael P. (Department: 2877)

Optics: measuring and testing

By polarized light examination

Of surface reflection

Reexamination Certificate

active

07006224

ABSTRACT:
Systems and methods for optical inspection of patterned and non-patterned objects. The methods include determining a state of polarization of light reflected from the object, establishing a polarization state of the incident light, and filtering the reflected light by polarization so as to provide an optical signal that is detected by a detector.

REFERENCES:
patent: 4893932 (1990-01-01), Knollenberg
patent: 5432607 (1995-07-01), Taubenblatt
patent: 6046811 (2000-04-01), Wolff et al.
patent: 2003/0020904 (2003-01-01), Uto et al.
patent: 2003/0025905 (2003-02-01), Meeks
patent: WO 02/25708 (2002-03-01), None
patent: WO 02/27288 (2002-04-01), None
patent: WO 02/40970 (2002-05-01), None
“International Search Report”, International Searching Authority, PCT/US 03/36837, (May 24, 2004).

Affiliated with

Also associated with

Rating

Method and system for optical inspection of an object does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and system for optical inspection of an object, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and system for optical inspection of an object will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3702387