Method and system for operating a mass flow controller

Details Method and system for operating a mass flow controller Method and system for operating a mass flow controller

2008-09-26

2010-11-02

Feliciano, Eliseo Ramos (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Mechanical measurement system

C702S050000, C702S100000, C700S275000, C700S281000, C700S282000, C165S295000, C073S001160, C073S023200, C073S861010, C048S198600

Reexamination Certificate

active

07826986

ABSTRACT:
A system and method for operating a mass flow controller is described. One embodiment validates the operation of a mass flow controller thermal sensor, including detecting zero drift and span drift in the sensor by comparing the thermal sensor output to a pressure sensor output. In one embodiment, each sensor provides a signal to a digital controller or other processing unit and the controller calculates the mass flow rates of a gas flowing through the unit as measured by the sensors. The mass flow rates may then be compared to determine if one of the thermal sensor is operating properly.

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