Method and system for observing a specimen using a scanning...

Details Method and system for observing a specimen using a scanning... Method and system for observing a specimen using a scanning...

2011-04-26

2011-04-26

Souw, Bernard E (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S307000, C250S310000, C382S148000, C382S149000

Reexamination Certificate

active

07932493

ABSTRACT:
It is intended to reduce the auto focusing time and to increase the stability in a case that a defect on a specimen that has been detected by an inspection apparatus is observed by using a scanning electron microscope. One or more regions to be used for auto focusing are set in an imaging region or its neighborhood on the basis of semiconductor design information. A target focusing position in the imaging region is determined by performing auto focusing using the thus-set regions. The determined target focusing position is used for low-magnification imaging and high-magnification imaging. An auto focusing mode that is suitable for each imaging region is selected on the basis of the semiconductor design information.

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