Method and system for measuring laser induced phenomena...

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed

Reexamination Certificate

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C438S798000, C257SE21531

Reexamination Certificate

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07456032

ABSTRACT:
A method and system for measuring laser induced phenomena changes of at least one of a resistance, a capacitance and an inductance in a semiconductor device. The method comprises interconnecting an electrical bridge circuit across the semiconductor device, the semiconductor device being connected as one of at least four circuit elements of the bridge circuit; inducing the changes in the semiconductor; and monitoring a balance condition of the bridge circuit.

REFERENCES:
patent: 4578641 (1986-03-01), Tiedje
patent: 6369603 (2002-04-01), Johnston et al.

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