Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
Reexamination Certificate
2005-06-21
2008-11-25
Smoot, Stephen W (Department: 2813)
Semiconductor device manufacturing: process
With measuring or testing
Electrical characteristic sensed
C438S798000, C257SE21531
Reexamination Certificate
active
07456032
ABSTRACT:
A method and system for measuring laser induced phenomena changes of at least one of a resistance, a capacitance and an inductance in a semiconductor device. The method comprises interconnecting an electrical bridge circuit across the semiconductor device, the semiconductor device being connected as one of at least four circuit elements of the bridge circuit; inducing the changes in the semiconductor; and monitoring a balance condition of the bridge circuit.
REFERENCES:
patent: 4578641 (1986-03-01), Tiedje
patent: 6369603 (2002-04-01), Johnston et al.
Chua Choon Meng
Koh Lian Ser
Ng Hoo Yin
Phang Jacob Chee Hong
Tan Soon Huat
Semicaps PTE Ltd.
Smoot Stephen W
Townsend and Townsend / and Crew LLP
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