Method and system for managing semiconductor manufacturing...

Details Method and system for managing semiconductor manufacturing... Method and system for managing semiconductor manufacturing...

2011-07-12

2011-07-12

Patel, Ramesh B (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S109000, C700S110000, C438S014000, C257SE21525

Reexamination Certificate

active

07979154

ABSTRACT:
A management system includes a variable-period setting unit that sets a variable period in which quality-control values vary. Then, a retrieving unit retrieves events sandwiching the variable period. The events can be a maintenance of the semiconductor manufacturing device and/or a change of a correction value. An analysis-period setting unit sets an analysis period for analyzing a cause of variation of the quality-control values between the events retrieved by the retrieving unit.

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