Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate
2006-12-18
2010-02-16
Lin, Sun J (Department: 2825)
Computer-aided design and analysis of circuits and semiconductor
Nanotechnology related integrated circuit design
C716S030000, C716S030000
Reexamination Certificate
active
07665048
ABSTRACT:
A method and apparatus for inspection optimization is provided. Inspection optimization improves the parametric and functional yield using optimized inspection lists for in-line semiconductor manufacturing metrology and inspection equipment.
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Chan Kevin
Drege Emmanuel
Jakatdar Nickhil
Litvintseva Svetlana
Miller Mark A.
Cadence Design Systems Inc.
Lin Sun J
Vista IP Law Group LLP
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