Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2011-03-29
2011-03-29
Shechtman, Sean P (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C702S084000, C438S005000, C156S345400, C216S066000
Reexamination Certificate
active
07917241
ABSTRACT:
A method and system of location specific processing on a plurality of substrates is described. The method comprises measuring metrology data for the plurality of substrates. Thereafter, the method comprises computing correction data for a first substrate using the metrology data, followed by computing correction data for a second substrate using the metrology data. While computing the correction data for a second substrate, the method comprises applying the correction data for a first substrate to the first substrate using a gas cluster ion beam (GCIB).
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Caliendo Steven P.
Hofmeester Nicolaus J.
Shechtman Sean P
TEL Epion Inc.
Wood Herron & Evans LLP
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