Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate
2007-07-24
2007-07-24
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
Focus or magnification control
C355S053000, C355S077000
Reexamination Certificate
active
11408956
ABSTRACT:
A focus system that includes a calibration subsystem and a control subsystem. The control subsystem, which includes a control sensor, is in close proximity to the exposing of an image. The calibration subsystem, which includes a calibration sensor and a control sensor, is located remotely from, or off-axis with respect to, the exposing of an image. By separating calibration and control functions, the functional requirements can be separated into two (or more) types of sensors.
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English-language abstract of Japanese Publication No. 61 196532, published Aug. 30, 1986.
Advanced Focus System Development Task Proposal Submitted in response to Advance Lithography SOL BAA 99-14, Mar. 2, 1999, pp. 1-34, Silicon Valley Group, Inc. Lithography Division.
Filosi Peter L.
Kreuzer Justin L.
Mason Christopher J.
Nelson Michael L.
ASML Holding N.V.
Mathews Alan
Sterne Kessler Goldstein & Fox P.L.L.C.
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