Method and system for improving focus accuracy in a...

Details Method and system for improving focus accuracy in a... Method and system for improving focus accuracy in a...

2005-02-22

2005-02-22

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Focus or magnification control

C355S053000, C355S077000

Reexamination Certificate

active

06859260

ABSTRACT:
A focus system that includes a calibration subsystem and a control subsystem. The control subsystem, which includes a control sensor, is in close proximity to the exposing of an image. The calibration subsystem, which includes a calibration sensor and a control sensor, is located remotely from, or off-axis with respect to, the exposing of an image. By separating calibration and control functions, the functional requirements can be separated into two (or more) types of sensors.

REFERENCES:
patent: 5883703 (1999-03-01), Knirck et al.
patent: 6208407 (2001-03-01), Loopstra
patent: 6341007 (2002-01-01), Nishi et al.
patent: 6509957 (2003-01-01), Tanaka
Advanced Focus System Development Task Proposal Submitted in response to Advanced Lithography SOL BAA 99-14, Mar. 2, 1999, pp. 1-34, Silicon Valley Group, Inc., Lithography Division.

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