Method and system for high-speed, precise micromachining an...

Details Method and system for high-speed, precise micromachining an... Method and system for high-speed, precise micromachining an...

2011-01-18

2011-01-18

Ghyka, Alexander G (Department: 2812)

Semiconductor device manufacturing: process

Semiconductor substrate dicing

By electromagnetic irradiation

C438S460000, C219S121690, C257SE21599

Reexamination Certificate

active

07871903

ABSTRACT:
A method and system for high-speed, precise micromachining an array of devices are disclosed wherein improved process throughput and accuracy, such as resistor trimming accuracy, are provided. Beam scanning and deflection are both used to distribute beam spots to elements of an array of elements for selective processing. The deflection can be performed with a solid state deflector.

REFERENCES:
patent: 3941973 (1976-03-01), Luck, Jr. et al.
patent: 4044222 (1977-08-01), Kestenbaum
patent: 4399345 (1983-08-01), Lapham et al.
patent: 4429298 (1984-01-01), Oberholzer
patent: 4511607 (1985-04-01), White
patent: 4532402 (1985-07-01), Overbeck
patent: 4551607 (1985-11-01), Moy
patent: 4647899 (1987-03-01), Moy
patent: 4761774 (1988-08-01), Ishibashi et al.
patent: 4826785 (1989-05-01), McClure et al.
patent: 4827325 (1989-05-01), Or-Bach et al.
patent: 4853671 (1989-08-01), Iversen et al.
patent: 4861964 (1989-08-01), Sinohara
patent: 4901052 (1990-02-01), Chapel et al.
patent: 4935801 (1990-06-01), McClure et al.
patent: 4962294 (1990-10-01), Beckham et al.
patent: 5059764 (1991-10-01), Baer
patent: 5087987 (1992-02-01), Simbal
patent: 5104480 (1992-04-01), Wojnarowski et al.
patent: 5111325 (1992-05-01), DeJager
patent: 5208437 (1993-05-01), Miyauchi et al.
patent: 5233327 (1993-08-01), Bartush et al.
patent: 5265114 (1993-11-01), Sun et al.
patent: 5294567 (1994-03-01), Dorfman et al.
patent: 5300756 (1994-04-01), Cordingley
patent: 5374590 (1994-12-01), Batdorf et al.
patent: 5404247 (1995-04-01), Cobb et al.
patent: 5473624 (1995-12-01), Sun
patent: 5498851 (1996-03-01), Hayashi et al.
patent: 5569398 (1996-10-01), Sun et al.
patent: 5633736 (1997-05-01), Griffith et al.
patent: 5656186 (1997-08-01), Mourou et al.
patent: 5662822 (1997-09-01), Tada et al.
patent: 5675310 (1997-10-01), Wojarowski et al.
patent: 5676866 (1997-10-01), in den Bäumen et al.
patent: 5685995 (1997-11-01), Sun et al.
patent: 5720894 (1998-02-01), Neev et al.
patent: 5742634 (1998-04-01), Rieger et al.
patent: 5744780 (1998-04-01), Chang et al.
patent: 5747869 (1998-05-01), Prall et al.
patent: 5751585 (1998-05-01), Cutler et al.
patent: 5753391 (1998-05-01), Stone et al.
patent: 5796392 (1998-08-01), Eglit
patent: 5808272 (1998-09-01), Sun et al.
patent: 5835280 (1998-11-01), Griffith
patent: 5837962 (1998-11-01), Overbeck
patent: 5838355 (1998-11-01), Narayan et al.
patent: 5841099 (1998-11-01), Owen et al.
patent: 5847960 (1998-12-01), Cutler et al.
patent: 5849623 (1998-12-01), Wojarowski et al.
patent: 5864430 (1999-01-01), Dickey et al.
patent: 5865832 (1999-02-01), Knopp et al.
patent: 5925271 (1999-07-01), Pollack et al.
patent: 5969877 (1999-10-01), Maeda
patent: 5976392 (1999-11-01), Chen
patent: 5998759 (1999-12-01), Smart
patent: 6031561 (2000-02-01), Narayan et al.
patent: 6037564 (2000-03-01), Tatah
patent: 6057180 (2000-05-01), Sun et al.
patent: 6103992 (2000-08-01), Noddin
patent: 6144118 (2000-11-01), Cahill et al.
patent: 6150630 (2000-11-01), Perry
patent: 6169014 (2001-01-01), McCulloch
patent: 6172325 (2001-01-01), Baird et al.
patent: 6181728 (2001-01-01), Cordingley et al.
patent: 6184490 (2001-02-01), Schweizer
patent: 6191486 (2001-02-01), Bernstein
patent: 6225595 (2001-05-01), Wei et al.
patent: 6239406 (2001-05-01), Onoma et al.
patent: 6268586 (2001-07-01), Stuart et al.
patent: 6281471 (2001-08-01), Smart
patent: 6285002 (2001-09-01), Ngoi et al.
patent: 6294778 (2001-09-01), Cappiello
patent: 6297541 (2001-10-01), Ema et al.
patent: 6300590 (2001-10-01), Lauer et al.
patent: 6322711 (2001-11-01), Chen
patent: 6339604 (2002-01-01), Smart
patent: 6340806 (2002-01-01), Smart et al.
patent: 6341029 (2002-01-01), Fillion et al.
patent: 6441337 (2002-08-01), Isaji et al.
patent: 6462306 (2002-10-01), Kitai
patent: 6462307 (2002-10-01), Hennig et al.
patent: 6472295 (2002-10-01), Morris et al.
patent: 6483071 (2002-11-01), Hunter et al.
patent: 6495791 (2002-12-01), Hunter et al.
patent: 6501061 (2002-12-01), Kitai et al.
patent: 6510605 (2003-01-01), Smejkal et al.
patent: 6518543 (2003-02-01), Benz et al.
patent: 6534743 (2003-03-01), Swenson et al.
patent: 6541290 (2003-04-01), Bang et al.
patent: 6541731 (2003-04-01), Mead et al.
patent: 6573473 (2003-06-01), Hunter et al.
patent: 6574250 (2003-06-01), Sun et al.
patent: 6593542 (2003-07-01), Baird et al.
patent: 6621040 (2003-09-01), Perry et al.
patent: 6639177 (2003-10-01), Ehrmann et al.
patent: 6662063 (2003-12-01), Hunter et al.
patent: 6664498 (2003-12-01), Forsman et al.
patent: 6664500 (2003-12-01), Wilbur et al.
patent: 6689985 (2004-02-01), Lipman et al.
patent: 6703582 (2004-03-01), Smart et al.
patent: 6717101 (2004-04-01), Morris et al.
patent: 6727458 (2004-04-01), Smart
patent: 6738396 (2004-05-01), Filgas et al.
patent: 6777645 (2004-08-01), Ehrmann et al.
patent: 6816294 (2004-11-01), Unrath et al.
patent: 6838639 (2005-01-01), Kreuter et al.
patent: 6849824 (2005-02-01), Arai
patent: 6875951 (2005-04-01), Sakamoto et al.
patent: 6951995 (2005-10-01), Couch et al.
patent: 6972268 (2005-12-01), Ehrmann et al.
patent: 6989508 (2006-01-01), Ehrmann et al.
patent: 7015418 (2006-03-01), Cahill et al.
patent: 7027155 (2006-04-01), Cordingley et al.
patent: 7050208 (2006-05-01), Overbeck
patent: 7119351 (2006-10-01), Woelki
patent: 7148447 (2006-12-01), Ehrmann et al.
patent: 7176407 (2007-02-01), Hunter et al.
patent: 7192846 (2007-03-01), Cordingley et al.
patent: 7394476 (2008-07-01), Cordingley et al.
patent: 7666759 (2010-02-01), Couch et al.
patent: 2001/0045419 (2001-11-01), Dunsky et al.
patent: 2002/0003130 (2002-01-01), Sun et al.
patent: 2002/0005396 (2002-01-01), Baird et al.
patent: 2002/0009843 (2002-01-01), Kyusho et al.
patent: 2002/0050488 (2002-05-01), Nikitin et al.
patent: 2002/0167581 (2002-11-01), Cordingley et al.
patent: 2003/0042230 (2003-03-01), Gross et al.
patent: 2003/0172527 (2003-09-01), Kitai et al.
patent: 2003/0178396 (2003-09-01), Naumov et al.
patent: 2004/0009618 (2004-01-01), Couch et al.
patent: 2004/0134896 (2004-07-01), Gu et al.
patent: 2004/0144760 (2004-07-01), Cahill et al.
patent: 2004/0188399 (2004-09-01), Smart
patent: 2005/0199598 (2005-09-01), Hunter et al.
patent: 2005/0233537 (2005-10-01), Couch et al.
patent: 2006/0000814 (2006-01-01), Gu et al.
patent: 2006/0028655 (2006-02-01), Cordingley et al.
patent: 2006/0086702 (2006-04-01), Smart
patent: 2006/0108337 (2006-05-01), Gu et al.
patent: 2006/0151704 (2006-07-01), Cordingley
patent: 2006/0186096 (2006-08-01), Schramm
patent: 2006/0189091 (2006-08-01), Gu
patent: 2006/0191884 (2006-08-01), Johnson et al.
patent: 2006/0192845 (2006-08-01), Cordingley et al.
patent: 2006/0199354 (2006-09-01), Gu
patent: 2006/0207975 (2006-09-01), Ehrmann et al.
patent: 2006/0216927 (2006-09-01), Cordingley et al.
patent: 2006/0256181 (2006-11-01), Ehrmann et al.
patent: 2007/0031993 (2007-02-01), Nemets et al.
patent: 2007/0052791 (2007-03-01), Cordingley et al.
patent: 2007/0075058 (2007-04-01), Ehrmann et al.
patent: 2007/0106416 (2007-05-01), Griffiths et al.
patent: 2007/0117227 (2007-05-01), Gu
patent: 2007/0173075 (2007-07-01), Lee et al.
patent: 2007/0178714 (2007-08-01), Gu et al.
patent: 2007/0199927 (2007-08-01), Gu et al.
patent: 2007/0215575 (2007-09-01), Gu et al.
patent: 2007/0215820 (2007-09-01), Cordingley et al.
patent: 2008/0011852 (2008-01-01), Gu et al.
patent: 2008/0035614 (2008-02-01), Smart
patent: 2008/0067155 (2008-03-01), Gu
patent: 2008/0073438 (2008-03-01), Gu et al.
patent: 2008/0094640 (2008-04-01), Cordingley et al.
patent: 0902 474 (1999-03-01), None
patent: 2 331 038 (1999-05-01), None
patent: H2-137682 (1980-05-01), None
patent: 55-081095 (1980-06-01), None
patent: 56-143434 (1981-11-01), None
patent: 62-086839 (1987-04-01), None
patent: 62160726 (1987-07-01), None
patent: 63-136545 (1988-06-01), None
patent: 63-264286 (1988-11-01), None
patent: 63-302503 (1988-12-01), None
patent: 64-044295 (1989-02-01), None
patent: 02-089586 (1989-11-01), None
patent: 01-289586 (1990-03-01), None
patent: 02-063103 (1990-03-01), None
patent: 03-297588 (1991-12-01), None
patent: 04-098801 (1992-03-01), None

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