Method and system for finding an equivalent circuit...

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design

Reexamination Certificate

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C716S030000, C716S030000, C716S030000, C716S030000, C716S030000, C703S013000, C430S005000, C430S030000

Reexamination Certificate

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07743349

ABSTRACT:
The present invention provides a method and a system for designing an integrated circuit comprising a plurality of elements. The method includes obtaining a lithography-simulated layout corresponding to at least one element. The lithography-simulated layout accounts for lithography effects on the element. The method further includes determination of an equivalent circuit representation that is compatible to a circuit analysis tool, corresponding to the lithography-simulated layout with respect to one or more performance characteristics and based on user preferences. The method also provides equivalent circuit representation to the circuit analysis tool that analyzes one or more performance characteristics of the elements.

REFERENCES:
patent: 6706452 (2004-03-01), Hayano et al.
patent: 2003/0005390 (2003-01-01), Takashima et al.
patent: 2003/0237064 (2003-12-01), White et al.
patent: 2004/0229130 (2004-11-01), Baba-Ali
“Backend CAD Flows for Restrictive Design Rules”, by Mark Lavin, Fook-Luen Heng, Greg Northrop @ IEEE, Nov. 7, 2004.
“Physical & Timing Verification of Subwavelength-scale Designs—Part 1: lithography Impact on MOSFETs” by Robert Pack, Valery Axelrad, Andrei Shibkov, Victor Boksha, Judy Huckabay, Rachid Salik, Wolf Staud, Ruoping Wang, Warren Grobman, Proceedings of SPIE vol. 5042 @2003.
Balasinski, et al, Impact of Subwavelength CD Tolerance on Device Performance, Design, Process Integration, and Characterization for Microelectronics, Proceedings of the SPIE, Jul. 2002, pp. 361-368, vol. 4692.
Heng, et al, Toward Througn-Process Layout Quality Metrics, Data Analysis and Modeling for Process Control II, Proceedings of the SPIE, May 2005, pp. 161-167, vol. 5756.

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