Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation
Reexamination Certificate
2007-04-03
2007-04-03
Hoff, Marc S. (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system
Performance or efficiency evaluation
C702S117000, C700S108000
Reexamination Certificate
active
11290108
ABSTRACT:
A data filter for filtering process data to a statistical control model is provided to enhance the performance of the control model. The data filter selects a set of template data from a set of statistical process data. A set of grids is formed comprising the set of template data and a set of sample data and an absolute distance is calculated between each point of a grid in the set of grids and a minimum accumulated distance of a point of the grid is calculated using the absolute distance. A global optimal path is identified based on the minimum accumulated distance of the point, and a set of sample data is remapped to form a set of warped data based on the global optimal path and the set of reference data.
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Lin Chun-Hsien
Yeh Shuh-Chwen
Baran Mary Catherine
Haynes and Boone LLP
Hoff Marc S.
Taiwan Semiconductor Manufacturing Company , Ltd.
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