Method and system for e-beam scanning

Details Method and system for e-beam scanning Method and system for e-beam scanning

2007-10-02

2007-10-02

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S398000, C250S310000

Reexamination Certificate

active

10911216

ABSTRACT:
The disclosure relates to a method and system of electron beam scanning for measurement, inspection or review. In accordance with one embodiment, the method includes a first scan on a region to collect first image data. The first image data is processed to determine information about a feature in the region. A scanning method is selected for imaging the feature. A second scan using the selected scanning method on the feature is then applied to collect second image data.

REFERENCES:
patent: 5302828 (1994-04-01), Monahan
patent: 2001/0006216 (2001-07-01), Koike
patent: 09-180667 (1997-11-01), None
patent: 2001-006599 (2001-12-01), None

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