Method and system for diagnosing abnormal plasma discharge

Details Method and system for diagnosing abnormal plasma discharge Method and system for diagnosing abnormal plasma discharge

2007-07-02

2011-12-20

Charioui, Mohamed (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system

Performance or efficiency evaluation

C702S179000, C702S189000

Reexamination Certificate

active

08082124

ABSTRACT:
Provided are a data obtaining section (21) that obtains a time-series data fluctuating in accordance with the plasma conditions, a translation error calculation section (24) that calculates a determinism providing an indicator of whether the time-series data in the plasma are deterministic or stochastic, from the time-series data that have been obtained in the data obtaining unit (21), and an abnormal discharge determination section (26) that determines that the plasma is under the abnormal discharge conditions, in the case that the value representing the determinism calculated in the determinism derivation unit is less than or equal to a given threshold value, during the plasma generation. Examples of the value representing the determinism include translation error or permutation entropy. In the case the permutation entropy is used as a value representing the determinism, a permutation entropy calculation section is provided.

REFERENCES:
patent: 6761771 (2004-07-01), Satoh et al.
patent: 7115210 (2006-10-01), Calderoni et al.
patent: 7257457 (2007-08-01), Imai et al.
patent: 2004/0173319 (2004-09-01), Suzuki et al.
patent: 2006/0275931 (2006-12-01), Takizawa et al.
patent: 3031376 (1991-05-01), None
patent: 2001-066194 (2001-03-01), None
patent: 2002-168699 (2002-06-01), None
patent: 2003-273009 (2002-12-01), None
patent: 2003-100714 (2003-04-01), None
patent: 2003-173896 (2003-06-01), None
patent: 2004-134723 (2004-04-01), None
patent: 2006-128304 (2006-05-01), None
patent: 2006-140440 (2006-06-01), None
patent: WO2004-051713 (2004-06-01), None

Affiliated with

Also associated with

Rating

Method and system for diagnosing abnormal plasma discharge does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and system for diagnosing abnormal plasma discharge, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and system for diagnosing abnormal plasma discharge will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4265302