Method and system for detecting defects

Details Method and system for detecting defects Method and system for detecting defects

2007-09-11

2007-09-11

Epps, Georgia (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

C385S012000, C385S014000

Reexamination Certificate

active

11066879

ABSTRACT:
System for scanning a surface, including a light source producing an illuminating light beam; an objective lens assembly, located between the light source and the surface; at least one light detector; an apodizator located between the light source and the objective lens assembly; and a relay lens assembly located between the apodizator and the objective lens assembly, wherein the light source produces an image of the illuminating light beam on the apodizator, the apodizator blocks at least a portion of the illuminating light beam, the relay lens assembly images the blocked illuminating light beam at an entrance pupil of the objective lens assembly, and wherein at least one of said at least one light detector, detects light reflected from said surface.

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patent: 6879390 (2005-04-01), Kvamme et al.
patent: 7053999 (2006-05-01), Goldberg et al.

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