Method and system for detecting defects

Details Method and system for detecting defects Method and system for detecting defects

2005-04-19

2005-04-19

Rosenberger, Richard A. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237500

Reexamination Certificate

active

06882417

ABSTRACT:
System for scanning a surface, including a light source producing an illuminating light beam; an objective lens assembly, located between the light source and the surface; at least one light detector; an apodizator located between the light source and the objective lens assembly; and a relay lens assembly located between the apodizator and the objective lens assembly, wherein the light source produces an image of the illuminating light beam on the apodizator, the apodizator blocks at least a portion of the illuminating light beam, the relay lens assembly images the blocked illuminating light beam at an entrance pupil of the objective lens assembly, and wherein at least one of said at least one light detector, detects light reflected from said surface.

REFERENCES:
patent: 5177559 (1993-01-01), Batchelder et al.
patent: 5699447 (1997-12-01), Alumot et al.
patent: 5768017 (1998-06-01), King et al.
patent: 6064517 (2000-05-01), Chuang et al.
patent: 6122046 (2000-09-01), Almogy
patent: 6178257 (2001-01-01), Alumot et al.
patent: 6259093 (2001-07-01), Wakiyama et al.

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