Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate
2006-11-07
2006-11-07
Bueker, Richard (Department: 1763)
Coating processes
Coating by vapor, gas, or smoke
C118S726000
Reexamination Certificate
active
07132128
ABSTRACT:
A system and method is disclosed for vaporizing a solid precursor and transporting the precursor vapor to a process chamber. The film precursor vaporization system is coupled to the process chamber and positioned directly above the substrate. A precursor valve system within the film precursor vaporization system permits closing off the flow of precursor vapor to the process chamber while carrier gas flows through or over the film precursor, and once the carrier gas is saturated with precursor vapor, the precursor valve system is opened to permit the flow of precursor vapor to the substrate.
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Bueker Richard
Tokyo Electron Limited
Wood Herron & Evans LLP
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