Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate
2006-12-19
2006-12-19
Rachuba, M. (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
With indicating
C451S011000, C451S056000, C451S285000, C451S443000
Reexamination Certificate
active
07150675
ABSTRACT:
In a system and a method according to the present invention, a sensor signal, such as a motor current signal, from a drive assembly of a pad conditioning system is used to estimate the status of one or more consumables in a CMP system.
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patent: WO 01/58644 (2001-08-01), None
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Kramer Jens
Kunath Jens
Stoeckgen Uwe Gunter
Advanced Micro Devices , Inc.
Rachuba M.
Williams Morgan & Amerson P.C.
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