Method and system for controlling semiconductor...

Details Method and system for controlling semiconductor... Method and system for controlling semiconductor...

2011-05-03

2011-05-03

Decady, Albert (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Specific application of control based on elapsed time

C700S291000

Reexamination Certificate

active

07937189

ABSTRACT:
A method for controlling semiconductor manufacturing equipment in a waiting mode, comprising:retrieving information about a waiting time for a product to be provided to the semiconductor manufacturing equipment on a production line, the product being to be subjected to predetermined processing by the semiconductor manufacturing equipment;comparing the waiting time with a period of time required for energy saving control, the period of time required for energy saving control including:lowering electric power and other energy used by the semiconductor manufacturing equipment in the waiting mode to a low-energy level at which the processing is not ready, andthen raising the electric power and the other energy to a level at which the processing is ready; andproviding the energy saving control during the waiting time if the waiting time is longer than the required period of time.

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