Method and system for conducting event-streamed spectrum...

Details Method and system for conducting event-streamed spectrum... Method and system for conducting event-streamed spectrum...

2007-06-28

2010-12-28

Kim, Robert (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S307000, C250S309000, C250S310000, C250S311000, C850S009000, C702S033000, C702S034000, C702S035000

Reexamination Certificate

active

07858935

ABSTRACT:
A method and system for conducting event-streamed spectrum imaging concurrently collects electron and spectral signals resulting from a raster scan of a sample. The signals are formatted and assembled as a packet stream. The packet stream is transmitted to a host where it is buffered, stored and processed.

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