Radiant energy – Invisible radiant energy responsive electric signalling – With means to inspect passive solid objects
Reexamination Certificate
2006-06-13
2006-06-13
Gabor, Otilia (Department: 2884)
Radiant energy
Invisible radiant energy responsive electric signalling
With means to inspect passive solid objects
C250S492200
Reexamination Certificate
active
07060980
ABSTRACT:
A method and apparatus for evaluating a semiconductor wafer. A combination of a photothermal modulated reflectance method and system with a photothermal IR radiometry system and method is utilized to provide information which can be used to determine properties of semiconductor wafers being evaluated. The system and method can provide for utilizing a common probe source and a common intensity modulated energy source. The system and method further provide an infrared detector for monitoring changes in infrared radiation emitted from a sample, and photodetector for monitoring changes in beam reflected from the sample.
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Nicolaides Lena
Salnik Alex
Gabor Otilia
Stallman & Pollock LLP
Therma-Wave, Inc.
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