Method and system for automatically managing probe mark shifts

Details Method and system for automatically managing probe mark shifts Method and system for automatically managing probe mark shifts

2007-03-06

2011-11-08

Velez, Roberto (Department: 2858)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S754100, C324S762050

Reexamination Certificate

active

08054097

ABSTRACT:
Disclosed is a method and a system for automatically managing probe mark shifts. A determination is made from test data as to whether a die on a wafer is defective. A probe mark check on the wafer is made to determine whether a probe mark is shifted. Necessary recovery action is performed in response to the probe mark being shifted. In the probe mark check, a plurality of probe mark positions are selected from the test data. A determination is then made as to whether at least one of the plurality of probe mark positions violates an engineering rule.

REFERENCES:
patent: 5644245 (1997-07-01), Saitoh et al.
patent: 2004/0227504 (2004-11-01), Strom
patent: 2005/0075835 (2005-04-01), Tseng et al.
patent: 2007/0164763 (2007-07-01), Park
Chinese Patent Office, Office Action issued Sep. 20, 2010, Application No. 200710106561.X, 6 pages.

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