Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2006-11-28
2006-11-28
Spector, David N. (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S223100, C359S224200, C359S291000, C359S298000
Reexamination Certificate
active
07142349
ABSTRACT:
A spatial light modulator is provided. The spatial light modulator includes a first substrate, the first substrate comprising a plurality of electrodes adapted to receive control signals, and a bias grid coupled to the first substrate and electrically isolated from the plurality of electrodes. The spatial light modulator also includes a mirror plate electrically coupled to the bias grid and adapted to rotate from a first orientation to a second orientation in response to the control signals received by the plurality of electrodes. The spatial light modulator further includes a landing post support structure coupled to the first substrate and electrically coupled to the bias grid and a landing post coupled to the landing post support structure. The landing post is electrically coupled to the bias grid and adapted to make contact with the mirror plate positioned at the first orientation.
REFERENCES:
patent: 4229732 (1980-10-01), Hartstein et al.
patent: 4317611 (1982-03-01), Petersen
patent: 4566935 (1986-01-01), Hornbeck
patent: 4615595 (1986-10-01), Hornbeck
patent: 5061049 (1991-10-01), Hornbeck
patent: 5172262 (1992-12-01), Hornbeck
patent: 5311360 (1994-05-01), Bloom et al.
patent: 5382961 (1995-01-01), Gale, Jr.
patent: 5448314 (1995-09-01), Heimbuch et al.
patent: 5452024 (1995-09-01), Sampsell
patent: 5489952 (1996-02-01), Gove et al.
patent: 5504614 (1996-04-01), Webb et al.
patent: 5535047 (1996-07-01), Hornbeck
patent: 5583688 (1996-12-01), Hornbeck
patent: 5589852 (1996-12-01), Thompson et al.
patent: 5600383 (1997-02-01), Hornbeck
patent: 5661591 (1997-08-01), Lin et al.
patent: 5663749 (1997-09-01), Farris et al.
patent: 5742419 (1998-04-01), Dickensheets et al.
patent: 5757536 (1998-05-01), Ricco et al.
patent: 5835256 (1998-11-01), Huibers
patent: 5999306 (1999-12-01), Atobe et al.
patent: 6038056 (2000-03-01), Florence et al.
patent: 6046840 (2000-04-01), Huibers
patent: 6049317 (2000-04-01), Thompson et al.
patent: 6172797 (2001-01-01), Huibers
patent: 6201521 (2001-03-01), Doherty
patent: 6252277 (2001-06-01), Chan et al.
patent: 6323982 (2001-11-01), Hornbeck
patent: 6337760 (2002-01-01), Huibers et al.
patent: 6356378 (2002-03-01), Huibers
patent: 6386661 (2002-05-01), Richards
patent: 6396619 (2002-05-01), Huibers et al.
patent: 6429033 (2002-08-01), Gee et al.
patent: 6522454 (2003-02-01), Meier et al.
patent: 6528887 (2003-03-01), Daneman et al.
patent: 6529310 (2003-03-01), Huibers et al.
patent: 6538800 (2003-03-01), Huibers
patent: 6542653 (2003-04-01), Wu et al.
patent: 6543286 (2003-04-01), Garverick et al.
patent: 6643426 (2003-11-01), McDonald
patent: 6809852 (2004-10-01), Tao et al.
patent: 7026695 (2006-04-01), Yang et al.
patent: 2002/0041455 (2002-04-01), Sawada et al.
patent: 2002/0071166 (2002-06-01), Jin et al.
patent: 2002/0071169 (2002-06-01), Bowers et al.
patent: 2002/0132389 (2002-09-01), Patel et al.
patent: 2003/0117686 (2003-06-01), DiCarlo
patent: 2004/0004753 (2004-01-01), Pan
patent: 2004/0008402 (2004-01-01), Patel et al.
patent: 2004/0125347 (2004-07-01), Patel et al.
patent: 2004/0136044 (2004-07-01), Miller et al.
patent: 2004/0184133 (2004-09-01), Su et al.
patent: 2004/0190817 (2004-09-01), Aubuchon
patent: 2005/0041277 (2005-02-01), Huibers
patent: 1237032 (2002-09-01), None
Henley et al., “A New SOI Manufacturing Technology Using Atomic layer Cleaving.” Silicon Genesis Corporation Campbell CA. pp. 1-5.
Petersen, K.E., Micromechanical Light Modulator Array Fabricated On Silicon. Applied Physics Letters. Oct. 15, 1977, pp. 521-523, vol. 31 No. 8.
Petersen, K.E., Micromechanical Membrane Switches On Silicon. IBM J. Res. Develop., Jul. 1979, pp. 376-385. vol. 23, No. 4.
Miradia Inc.
Spector David N.
Townsend and Townsend / and Crew LLP
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