Method and structure for ballast resistor

Active solid-state devices (e.g. – transistors – solid-state diode – Bipolar transistor structure

Reexamination Certificate

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C257S580000, C257SE21370

Reexamination Certificate

active

07919830

ABSTRACT:
A method for fabricating a low-value resistor such as a ballast resistor for bipolar junction transistors. The resistor may be fabricated using layers of appropriate sheet resistance so as to achieve low resistance values in a compact layout. The method may rely on layers already provided by a conventional CMOS process flow, such as contact plugs and fully silicided (FUSI) metal gates.

REFERENCES:
patent: 6531745 (2003-03-01), Woolery et al.
patent: 2005/0133839 (2005-06-01), Okushima
patent: 2006/0063341 (2006-03-01), Beasom
patent: 2006/0267047 (2006-11-01), Murayama
patent: 2007/0034960 (2007-02-01), Zhang et al.

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