Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1982-09-16
1983-08-02
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156626, 156651, 156654, 252 791, H01L 21306, C03C 1500, C03C 2506
Patent
active
043964591
ABSTRACT:
A method for delineating defects in the <111> surface of an indium antimonide crystal wafer by treating said surface with a 5 percent solution of iodine in N,N-dimethylacetamide to form triangularly shaped etch pits in the defect area.
REFERENCES:
patent: 3143447 (1964-08-01), Norr
Compound Semiconductors, vol. 1, Preparation of III-V Compounds, Rheinhold 1963, QCI, J82, pp. 445-468, Etching of the III-V Intermetallic Compounds, by J. W. Faust, Jr.
Herning Paul E.
Sutcliffe Edward Y.
O'Brien William J.
Powell William A.
Singer Donald J.
The United States of America as represented by the Secretary of
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