Method and scanning electron microscope for measuring width...

Details Method and scanning electron microscope for measuring width... Method and scanning electron microscope for measuring width...

2008-06-10

2008-06-10

Vanore, David (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S307000

Reexamination Certificate

active

07385196

ABSTRACT:
A width-measurement method of reducing or eliminating an error in measurement of a width of an object on a sample resulting from the dimension of the beam diameter, wherein a width-measured value of the object to be width-measured which has been obtained on the basis of a secondary signal obtained from secondary particles emitted from the sample having thereon the object to be width-measured is corrected with a value with respect to a dimension value of a beam diameter.

REFERENCES:
patent: 5117111 (1992-05-01), Nakamura et al.
patent: 5750990 (1998-05-01), Mizuno et al.
patent: 6166380 (2000-12-01), Kitagawa et al.
patent: 6396059 (2002-05-01), Singh et al.
patent: 0 781 976 (1997-07-01), None
patent: 0 877 409 (1998-11-01), None
patent: 63-042407 (1988-02-01), None
patent: 02-190708 (1990-07-01), None
patent: 6-347246 (1994-12-01), None
patent: 11-25898 (1999-01-01), None
patent: 11-224640 (1999-08-01), None

Affiliated with

Also associated with

Rating

Method and scanning electron microscope for measuring width... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and scanning electron microscope for measuring width..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and scanning electron microscope for measuring width... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2814757