Method and sample for radiation microscopy including a...

Details Method and sample for radiation microscopy including a... Method and sample for radiation microscopy including a...

2005-12-29

2008-09-30

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S306000, C250S307000, C250S308000, C250S492210, C250S491100, C216S039000, C438S460000

Reexamination Certificate

active

07429733

ABSTRACT:
A method and sample for radiation microscopy include a sample source that includes an area of interest, an outer side of a sample formed in the sample source adjacent to the area of interest, an inner side of the sample formed inside the sample source wherein at least a portion of the area of interest is included between the inner side of the sample and the outer side, and a particle beam channel formed inside the sample source for conducting a particle beam to or from the inner side of the sample.

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patent: 2004/0016888 (2004-01-01), Haraguchi
patent: 2005/0064610 (2005-03-01), Bruley et al.

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