Method and relative test structure for measuring the...

Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters

Reexamination Certificate

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Reexamination Certificate

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10836827

ABSTRACT:
A method and a relative test structure for measuring the coupling capacitance between two interconnect lines exploits the so-called cross-talk effect and keeps an interconnect line at a constant reference voltage. This approach addresses the problem of short-circuit currents that affect known test structures, and allows a direct measurement of the coupling capacitance between the two interconnect lines. Capacitance measurements may also be used for determining points of interruption of interconnect lines. When a line is interrupted, the measured coupling capacitance is the capacitance of a single conducting branch. The position of points of interruption of an interconnect line is determined by measuring the coupling capacitance of all segments of the line with a second conducting line.

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Kühn et al., “Interconnect Capacitances, Crosstalk, and Signal Delay in Vertically Integrated Circuits”, Siemens AG, Institute for Integrated Circuits & Fraunhofer Institute for Solid State Technology, München, Germany, © 1995 IEEE, pp. 10.3.1 to 10.3.4, month unavailable.

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