Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation
Reexamination Certificate
2006-02-14
2006-02-14
Tsai, Carol S. W. (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system
Performance or efficiency evaluation
C702S184000, C702S187000, C700S121000
Reexamination Certificate
active
06999897
ABSTRACT:
A method and related system for semiconductor equipment early warning management. The method includes recording process parameters of each piece of equipment, recording equipment parameters when each piece of equipment is processing, evaluating and recording the quality of semiconductor products and corresponding testing parameters, and analyzing a relationship between the corresponding process parameters, the corresponding equipment parameters, and the quality of semiconductor products of each piece of equipment.
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Chen Chien-Chung
Luo Haw-Jyue
Tai Hung-En
Wang Sheng-Jen
Hsu Winston
Powerchip Semiconductor Corp.
Tsai Carol S. W.
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