Method and related system for semiconductor equipment...

Details Method and related system for semiconductor equipment... Method and related system for semiconductor equipment...

2005-09-27

2005-09-27

Tsai, Carol S. W. (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system

Performance or efficiency evaluation

C702S084000, C702S182000, C702S183000, C702S185000, C702S187000, C700S108000, C438S005000

Reexamination Certificate

active

06950783

ABSTRACT:
A method and related system for semiconductor equipment prevention maintenance management. The method includes recording process parameters of each piece of equipment, recording equipment parameters when each piece of equipment is processing, evaluating and recording time and cost of prevention maintenance after each piece of equipment runs prevention maintenance, evaluating the quality of semiconductor products, and analyzing a relationship between the corresponding process parameter, the corresponding equipment parameters, prevention maintenance cost, and semiconductor products of each piece of equipment.

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patent: 2004/0115841 (2004-06-01), Molnar

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