Cleaning and liquid contact with solids – Processes – With treating fluid motion
Reexamination Certificate
2011-01-04
2011-01-04
Kornakov, Michael (Department: 1714)
Cleaning and liquid contact with solids
Processes
With treating fluid motion
C134S006000
Reexamination Certificate
active
07862662
ABSTRACT:
Methods for cleaning using a tri-state body are disclosed. A substrate having a particle deposited thereon is provided. A tri-state body that has a solid portion, liquid portion, and a gas portion is generated. A force is applied over the tri-state body to promulgate an interaction between the solid portion and the particle. The tri-state body is removed along with the particle from the surface of the substrate. The interaction between the solid portion and the particle causing the particle to be removed along with the tri-state body.
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Weai
de Larios John M.
Freer Erik M.
Korolik Mikhail
Mikhaylichenko Katrina
Ravkin Michael
Golightly Eric
Kornakov Michael
Lam Research Corporation
Martine & Penilla & Gencarella LLP
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