Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-05-26
2010-11-16
Glick, Edward J (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S055000
Reexamination Certificate
active
07834975
ABSTRACT:
A method for performing a tilted focus test includes the steps of providing a target object, providing a projection beam of radiation using a radiation source, providing a reflective device to introduce a projected projection beam of radiation onto the target portion, introducing a first projected projection beam of radiation onto the target object using the reflective device in a first orientation, using a tilting device for tilting the reflective device to a second orientation to provide a second projection beam with a tilt relative to said first projection beam, introducing a second projected projection beam of radiation onto the target object, and determining a lateral shift of the first and second projected projection beams on the target object and determining from said lateral shift a defocus of the target object with respect to the projected projection beam.
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English translation of Official Action issued on Mar. 26, 2009 in Japanese Application No. 2005-372890.
Burghoorn Jacobus
Den Boef Arie Jeffrey
Hauschild Jan
Leenders Martinus Hendrikus Antonius
Mickan Uwe
Asfaw Mesfin T
ASML Netherlands B.V.
Glick Edward J
Pillsbury Winthrop Shaw & Pittman LLP
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