Method and equipment for detecting pattern defect

Details Method and equipment for detecting pattern defect Method and equipment for detecting pattern defect

2006-11-06

2008-11-25

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

By polarized light examination

Of surface reflection

C356S364000

Reexamination Certificate

active

07456963

ABSTRACT:
An Inspection apparatus and method includes utilizing an emitter which emits a light beam, an illumination optical system, a detection optical system, and a processor. The illumination optical system includes a polarization controller, a coherence reducer, and an objective lens, for illuminating a specimen with a polarization condition controlled and coherency reduced light beam through the objective lens. The detection optical system includes an imaging lens and a sensor for detecting an image of the specimen illuminated by the light beam through the illumination optical system. The processor processes a signal outputted from the sensor and detects a defect on the specimen.

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