Method and dummy disc for uniformly depositing silicon nitride

Details Method and dummy disc for uniformly depositing silicon nitride Method and dummy disc for uniformly depositing silicon nitride

1996-01-30

1997-08-19

Bowers, Jr., Charles L.

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

Insulative material deposited upon semiconductive substrate

118724, H01L 21318

Patent

active

056588330

ABSTRACT:
In a process of fabricating an integrated circuit, a method for uniformly depositing silicon nitride by disposing a plurality of dummy discs beside the production wafers. The dummy discs are made of quartz or silicon carbide. Since the dummy discs can be used longer before been recycled, plenty dummy discs can be saved from disuse. Furthermore, the cost of the management and treatment of the dummy discs is great reduced in this way.

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Wolf, Stanley and Richard Tauber, Silicon Processing for the VLSI Era, vol. 1, pp. 27, 191-194 (1986).

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