Electric resistance heating devices – Heating devices – Vaporizer
Patent
1994-04-15
1996-07-16
Walberg, Teresa J.
Electric resistance heating devices
Heating devices
Vaporizer
392399, F24F 314, F22B 128
Patent
active
055375081
ABSTRACT:
An apparatus for generating dry vapor includes a manifold assembly with a channel for conveying a liquid from a liquid source. A vessel for holding the liquid is secured to the manifold assembly and includes a fill tube connected to receive liquid from the manifold assembly's channel. A heater is provided for heating the liquid in the vessel to generate a vapor. A settling chamber is located within the vessel above the liquid in the vessel from settling out liquid drops in the vapor. The settling chamber includes a vapor inlet with a cross-section that is substantially smaller than the vessel's cross-section for receiving vapor. A vapor outlet removes dry vapor from the settling chamber.
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Chuc Kien N.
Ebbing Peter F.
Applied Materials Inc.
Paik Sam
Walberg Teresa J.
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